Recycle and Reuse

CVD/ALD Ampoule Decontamination Service

We specialize in the safe cleaning of used Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) ampoules, preparing them for reuse.

Cleaning Capabilities

  1. Validated process for highly flammable and toxic species

  2. Validated process for late transition metals

  3. Validated process for early transition metals

  4. Solid precursor materials are under development and may be accepted on a case-by-case basis

Service Levels

Service Level 1: Decontamination Only

Service Level 2: Impeccable Clean

Analytical Reports Options:

  • Certificate of Conformity (COC)

  • Certificate of Analysis (COA) with ICP-MS (34 metals) in DI Water Result